我國高精度納米分辨率線位移測量技術獲新突破
http://www.kadhoai.com.cn 2026-04-09 19:46:03 來源:儀器信息網
近日從吉林省科技廳了解到,由長春光機所承擔的應用基礎研究項目——“高精度納米分辨率線位移測量技術研究”,日ri前qian在zai長chang春chun通tong過guo專zhuan家jia鑒jian定ding。鑒jian定ding委wei員yuan會hui專zhuan家jia一yi致zhi認ren為wei,該gai項xiang研yan究jiu所suo製zhi成cheng的de高gao精jing度du納na米mi測ce量liang傳chuan感gan器qi樣yang機ji達da到dao四si倍bei光guang學xue倍bei頻pin,技ji術shu指zhi標biao達da到dao國guo際ji先xian進jin水shui平ping。
據介紹,線位移尺寸測量是精密加工製造業的基礎之一。隨著被加工對象加工精度的提高,位移測量儀器必須具有高精度、高分辨率、大量程、體積小、重量輕等特點。市場上的光柵尺、感應同步器、磁柵等傳感器生產廠家眾多,這些廠家生產的傳感器結構簡單、價格低,但分辨率僅在1mm~0.5mm,yuanbunengmanzuyaoqiu。ciwai,shaoshujiagongzhongxinshiyongdeshuangpinjiguanggansheyiduoshijinkouhuojinyoushaoshuguoneikeyandanweidanjianyanzhi,suiranqijingdugao,fenbianlvkeda0.01mm,但也有結構複雜、體積龐大、價格高、對環境要求苛刻、穩定性較差等缺點。
juxi,benxiangmuyanjiuleyingyongyansheguanggansheyuanlijinxingxianweiyiceliangdelilunjisuanjiguanglushejidenggezhongjishuwenti,caiyongyansheguanggansheyuanlishixianlegaomiduguangzhadeweiyixinhaotiqu;實現了光學四細分,使光柵原始信號分辨率達到0.6μm;caiyongguangxuepianzhenqijianduiguangganshetiaowenjinxingkongjianyixiang,dedaojuyouwendingweixiangchadesiluguangdianxinhao,chafenchuliyizhiguangdianxinhaodezhiliudianpingpiaoyi,zengdalexinhaofuzhi,tigaoleceliangwendingxing。